AFM扫描过程的模拟及针尖形状反求

doi:10.3969/j.issn.1000-1158.2019.02.01

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Abstract To accurate measure the line widths of nano-grid and step structure is the hottest issues in metrology domain. AFM can be used to obtain the three-dimensional topographic information of the above structure, but the scanned image is the result of the interaction between the shape of the tip and the surface morphology of the sample. This interaction often leads to line width edge measurement distortion. To more accurately obtain the surface topography of the sample, firstly, the shape of the tip needs to be reconstructed, and then the distortion effect brought by the tip topography is eliminated as much as possible from the scanned image. Based on the blind reconstruction theory of mathematical morphology, Matlab was used to simulate the stepped sample surface scanned by different shape parameters of tips, the influences of the probe tip shape on the scanning results were evaluated, and got the initial realization of probe tip shape reconstruction based on measuring rough surface.

Key words： metrology line width measurement nano-step atomic force microscope tip shape blind reconstruction

Received: 24 April 2018 Published: 07 March 2019

PACS:

TB92

Corresponding Authors: GAO Si-tian E-mail: gaost@nim.ac.cn

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	Articles by authors
	SHI Yu-shu
	LIAN Xiao-yi
	WANG Yi-xuan
	HUANG Lu
	DONG Ming-Li
	HU Xiao-dong
	GAO Si-tian

Cite this article:

SHI Yu-shu,LIAN Xiao-yi,WANG Yi-xuan, et al. Simiulation of AFM Scanning Process and Tip Shape Estimation[J]. Acta Metrologica Sinica, 2019, 40(2): 177-182.

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http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2019.02.01 OR http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2019/V40/I2/177

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