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| Study on Antireflective Layer above Superconducting Nb Films |
| ZHONG Qing1,LIU Wen-de1,MA Xiao-huan2,WANG Jun2,ZHENG Chun-di1,WANG Xue-shen1,LI Jin-jin1 |
1.National Institute of Metrology, Beijing 100029, China
2.School of Instrumentation Science and Opto Electronics Engineering, Beijing Information Science and Technology University, Beijing 100192, China |
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Abstract An antireflective layer should be fabricated on the surface of Nb film which was used as the photon energy detection unit in the single photon standard.The spectral refractive index characteristics of Nb films with different thickness made by a magnetron sputter system, SiO2 and SiNx films made by a plasma enhanced chemical vapor deposition system were studied.To reduce the reflection ratio of the superconducting Nb film at 633 nm, the structure of the SiO2/Nb and SiNx/Nb structure were designed and fabricated.The reflectivity was effectively reduced,which was verified by the results of the calculation.
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Received: 16 May 2018
Published: 07 January 2019
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2019, Vol. 40 
