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| Accuracy Study on the Calibration System of Displacement Sensurs in Vacuum Eviroment |
| YE Ying-qian1,REN Guo-ying2,LI Wei-xian1,FAN Nai-yin3,ZHU Cheng-ji1,DONG Yi-fan1 |
1.Beijing Information Science Technology university, Beijing 100192, China
2.National Institute of Metrology, Beijing 100029, China
3.Henan Institute of Metrology, Zhengzhou, Henan 450000, China |
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Abstract To introduce the principle of precision displacement sensors calibration system in vacuum environment and accuracy test and verify. All of traditional calibration device and method to precision displacement sensor s are calibrated in the air environment. To keep the sports device in the same displacement, the rigid transmission is used. The measurement in air environment can be got by precision displacement sensor, and the measurement in vacuum environment can be got bysingle-frequency laser interferometer in Michelson optical system. According to JJF 1305—2011,a serious experiment were done to the calibration system, then make a comparative analysis of the error structure and calculate the measurement uncertainty to ensure the accuracy of precision displacement sensor.
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2018, Vol. 39 
