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| Experimental Research on the Control and Non-linear Calibration of Large-scale Two-dimensional Nanometer Displacement Stage |
| ZHOU Qi1,3,LIU Bing-feng2,LIAN Xiao-yi3,CHEN Ben-yong1,HUANG Lu3,LI Qi3,GAO Si-tian3 |
1. School of Mechanical Engineering and Automation, Zhejiang Sci-tech University, Hangzhou, Zhejiang 310018, China
2. School of Instrumentation Science and Opto-electronics Engineering, Beijing Information Science & Technology University, Beijing 100192, China
3. National Institute of Metrology, Beijing 100029, China |
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Abstract To study the control and non-linear correction of a large-scale two-dimensional nanometer displacement stage, a micro-displacement measurement system which based on the measurement principle of a laser interferometer was setted up.The composition of the dual-frequency laser interferometer measurement system was introduced, the control program of nanometer displacement stage and data acquisition program of laser interferometer were programmed. The non-linear calibration method was described, the polynomial third-order fitting and the third-order were compared through experiments. Experiments show that the calibration method using third-order piecewise fitting is better than third-order. Before calibration, the maximum nonlinearity error of x-axis and y-axis is 4.052 μm and 2.927 μm. After calibration, the maximum non-linearity of the x-axis is 15 nm and the maximum nonlinearity error of the y-axis is 17 nm, which is only 1% of the original nonlinearity error.
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Received: 24 April 2018
Published: 06 November 2018
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Corresponding Authors:
GAO Si-tian
E-mail: gaost@nim.ac.cn
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2018, Vol. 39 
