1.College of Mechanical Engineering and Automation, Fuzhou University, Fuzhou, Fujian 350116, China
2.Fujian Fu Guang Limited by Share Ltd, Fuzhou, Fujian 350004, China
Abstract The shortcomings of current ultra precision optical lens surface assessment methods is analysed. The existing optical elements surface characterization methods is embarked, combining with the three-dimensional surface parameters in the ISO25178-2. The relationship between the surface topography of optical lens and the corresponding optical properties is found out. The evaluation of the 3D surface of ultra precision optical lenses using the standard ISO is realized. The simulation results show that when the surface of the optical lens is highly subjectef to Gauss distribution, the transfer function of the optical system performance is evaluated with the decrease of the mean square value. And the example results show that the characteristics can also be well distinguished by the three dimensional parameters, and it has certain feasibility to characterize the optical surface by the use of the new comprehensive evaluation method.
WU Yi-wan,REN Zhi-ying,GAO Cheng-hui, et al. Study on 3D surface parameter evaluation method of ultra precision optical lenses[J]. Acta Metrologica Sinica, 2017, 38(4): 410-415.
［1］沈正祥,王占山,马彬,等.利用功率谱密度函数表征光学薄膜基底表面粗糙度［J］.光学仪器,2006,28（4）:141-145.
［2］吴冬良,戴一帆,王贵林.光学加工中高频误差对环围能量比的影响［J］.光学精密工程,2009,17(11):2705-2711.
［3］戴一帆,吴冬良,王贵林.光学加工中高频误差对散射损失比的影响［J］.光学精密工程,2009,17(10):2365-2370.
［4］张小强,武欣,王伟荣,等.平面光学元件平面度动态干涉拼接测量［J］.计量学报,2016,37(5):484-488.
［5］李剑白,李达成,李小芸,等.原子力显微镜测试光学超精密表面微轮廓的研究［J］.光学学报,2000,20（11）:1533-1536.
［6］Bennet H E,Bennet J M.Physics of Thin Films［M］.New York:Academic,1969.
［7］ Bhushan B,Wyant J C, Meiling J. A new three-dimensional non-contact digital optical profiler［J］. Wear, 1988, 122(3): 301-312.
［8］Geometrical product specifications (GPS) — Surface texture: Areal — Part 2: Terms, definitions and surface texture parameters: ISO 25178-2［S］．2012.
［9］杨旭东,李家春,谢铁邦.机械零件三维表面形貌测量与评定的研究［J］.机械设计与研究,2007,(8):102-104.
［10］马彬,王占山,沈正祥.功率谱密度函数对于超光滑光学元件表面的表征技术［C］//2008年全国博士生学术会议(光学测试新理论、新技术),长春,2008:24-28.
［11］Aikens D M,Wolfe C R,Lawson J K. The use of power spectral density (PSD) functions in specifying optics for the national ignition facility［J］. Proceeding of SPIE,1995, 2576:281-292.
2017, Vol. 38 
