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| An Accurate Determination Method of Characteristic Impedance of Transmission Line Based on Multi-TRL Algorithms |
| WANG Yi-bang,LUAN Peng,WU Ai-hua,LIANG Fa-guo,SUN Jing |
| The 13th Research Institute of China Electronics Technology Group Corporation, Shijiazhuang, Hebei 050051, China |
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Abstract On wafer S-parameter accuracy mainly depends on the characteristic impedance of transmission line standard. An accurate method of determination of characteristic impedance of coplanar waveguide is researched, which involves the deduction and optimization of Multi-TRL（Multi-Thru Reflect Line）algorithms to obtain the propagation constant, and uses the propagation constant determines characteristic impedance. The extraction software “wyb” of propagation constant and characteristic impedance were developed, and the method was validated against commercial Multi-TRL software Wincal by the same input of the measurements of calibration standards at on-wafer reference material RM8130. The result shows that, between 5~10 GHz, the relative error of the magnitude of characteristic impedance is within ±0.6％, and the phase is within ±0.55°.As frequency goes above to 40 GHz , the relative error of the magnitude of characteristic impedance is within±0.2%, the phase error within ±0.4°.
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Received: 29 October 2015
Published: 28 February 2017
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2017, Vol. 38 
