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| Manufacturing and Characterizing of Broadband on-Wafer SOLT Calibration Standards |
| LIU Chen,WU Ai-hua,SUN Jing,LIANG Fa-guo |
| The 13th Research Institute of China Electronics Technology Group Corporation, Shijiazhuang, Hebei 050051, China |
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Abstract On the GaAs substrate the SOLT calibration kits for on-wafer S-parameter test are designed. Using simulation method, the delay and loss of the offset transmission line on every standard in the calibration kits are characterized, and using measurement method based on NIST multiline TRL calibration, the capacitance of open standard parts and the inductance of the short standard are extracted. Subsequently the impedance of load standard is known by DC resistance measurement. Finally, the tests using independent developed SOLT calibration kits and NIST multiline TRL calibration are preformed. The results show that at the frequency below 20 GHz, the maximum deviation of the transmission magnitude is 0.1 dB, and the maximum deviation of transmission phase is 3.5 degree.
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Received: 07 September 2015
Published: 28 December 2016
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2017, Vol. 38 
