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| Numerical Study of the Metering Principle for Thermal Flow Sensor Based on Micro Electro Mechanical System |
| DUAN Suo-hang,DONG Sheng-long,LI Guo-guo,ZHANG Jin-long,TAO Ren-yi |
| State Key Laboratory of Coal-based Low Carbon Energy, ENN Group, Langfang, Hebei 065001, China |
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Abstract By means of computational fluid dynamics method, a mechanism model was established based on the metering principle of micro electro mechanical system thermal flow sensor. The temperature field distribution on the surface of the micro electro mechanical system sensor with different flow rate were numerical simulated and analyzed basing on above model. The relationship between signal output of sensor and the standard flow rates was investigated and the obtained conclusions were consistent with theory. Meanwhile, by comparison with the experimental data, the correctness of the established model was verified. In addition, by analyzing the thermal characterization of thermal flow sensor with different temperature and pressure, a certain temperature and pressure effects were discovered. In case of working temperature, pressure fluctuating strong or severe deviation from the calibration state, it will bring great measurement error.
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Received: 22 January 2015
Published: 14 October 2016
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Corresponding Authors:
Suo-Hang Duan
E-mail: duansuohang@enn.cn
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2016, Vol. 37 
