Acta Metrologica Sinica  2016, Vol. 37 Issue (5): 484-488    DOI: 10.3969/j.issn.1000-1158.2016.05.07
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Stitching Measurement of Plane Optical Element Flatness by Dynamic Interference
ZHANG Xiao-qiang1,WU Xin1,WANG Wei-rong2,YU Ying-jie1
1.Dept.of Precision Mechanical Engineering, Shanghai University, Shanghai 200072, China
2.Shanghai Machine Tool Works Co. Ltd., Shanghai 200093, China
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