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Research of the Atomic Force Microscope Scanning Head Based on the Qplus Technology |
WANG Zhi-xin1,2,GAO Si-tian2,LI Dong-sheng1,Li Qi2,LI Shi2,LI Wei3,SHI Yu-shu2 |
1.College of Metrology & Measurement Engineering, China Jiliang University, Hangzhou, Zhejiang 310018, China;
2. National Institute of Metrology, Beijing 100029, China |
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Abstract The atomic force microscope (AFM) scanning head based on the qPlus technology is preliminarily designed and assembled. The silicon cantilever sensor is replaced by quartz tuning fork type force sensor. Preamplifier circuit is designed and frequency characteristic of this scanning head is also analyzed. Finally, the experimental device for this scanning head is set up to make performance test. The test results show that the scanning head has a high sensitivity in the mode of frequency modulation. Meanwhile, the analysis of frequency characteristic indicates that the weight of tip and the bonding portion is the main factor to influence the resonant frequency of this scanning head. This research provides experiences for the design and assembly of this type scanning head and also lays a foundation for further study.
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Received: 07 September 2015
Published: 27 January 2016
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Corresponding Authors:
GAO Si-tian
E-mail: gaost@nim.ac.cn
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