Study on Tip Alignment Method of Dual-probe Atomic Force Microscopy
ZHANG Hua-kun1, GAO Si-tian1,2, LI Wei2, SHI Yu-shu2, WANG He-qun2
1.School of Instrument Science and Opto-electronics Engineering, Hefei University of Technology, Hefei,Anhui 230009, China;
2. National Institute of Metrology, Beijing 100029, China
Abstract Dual probes alignment measurement can virtually eliminate the effect of tip shape of traditional atomic force microscopy (AFM) on critical measurement (CD). Two tips (probe A and probe B) need contact to each other before measurement to establish a zero reference point. A method of progressive two-dimensional scanning is used to realized dual-probe nanoscale alignment. Firstly, it will align two probes to within 1μm through vision guidance. Secondly, the two probes continue to close, probe B is scanned by probe A in plane XOZ while reducing the scanning range and scanning step gradually to get the nanometer coordinate of probe B (YB,ZB). Lastly, the probe A will be move to YB and ZB in X and Z directions respectively, untill the probe A moves to touch the probe B in X direction. Results indicated that this method can effectively align dual probes, and the alignment accuracy is 10 nm.
ZHANG Hua-kun,GAO Si-tian,LI Wei, et al. Study on Tip Alignment Method of Dual-probe Atomic Force Microscopy[J]. Acta Metrologica Sinica, 2015, 36(1): 1-5.
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