Acta Metrologica Sinica  2015, Vol. 36 Issue (1): 1-5    DOI: 10.3969/j.issn.1000-1158.2015.01.01
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Study on Tip Alignment Method of Dual-probe Atomic Force Microscopy
ZHANG Hua-kun1, GAO Si-tian1,2, LI Wei2, SHI Yu-shu2, WANG He-qun2
1.School of Instrument Science and Opto-electronics Engineering, Hefei University of Technology, Hefei,Anhui 230009, China;   
2. National Institute of Metrology, Beijing 100029, China
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Abstract  Dual probes alignment measurement can virtually eliminate the effect of tip shape of traditional atomic force microscopy (AFM) on critical measurement (CD). Two tips (probe A and probe B) need contact to each other before measurement to establish a zero reference point. A method of progressive two-dimensional scanning is used to realized dual-probe nanoscale alignment. Firstly, it will align two probes to within 1μm through vision guidance. Secondly, the two probes continue to close, probe B is scanned by probe A in plane XOZ while reducing the scanning range and scanning step gradually to get the nanometer coordinate of probe B (YBZB). Lastly,  the probe A will be move to YB and ZB in X and Z directions respectively, untill  the probe A moves to touch the probe B in X direction. Results indicated that this method can effectively align dual probes, and the alignment accuracy is 10 nm.
Key wordsMetrology      Dual probes      Atomic force microscopy      Alignment method      Critical dimensional     
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ZHANG Hua-kun
GAO Si-tian
LI Wei
SHI Yu-shu
WANG He-qun
Cite this article:   
ZHANG Hua-kun,GAO Si-tian,LI Wei, et al. Study on Tip Alignment Method of Dual-probe Atomic Force Microscopy[J]. Acta Metrologica Sinica, 2015, 36(1): 1-5.
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http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2015.01.01     OR     http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2015/V36/I1/1
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