微小摩擦测试系统设计

doi:10.3969/j.issn.1000-1158.2013.05.11

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Abstract The law of micro-friction in meso-scale is studied. One optical testing method of micro friction based on the structure of parallel cantilever is given and the testing system is designed, the composition of test system, testing method, the design of force sensor , the testing method and the calibration of force sensor are introduced. The force sensor is calibrated and the deformation of sensor is measured by light reflection. Then the micro friction is obtained by analyzing data. The results of the experiment show the resolution of specification of micro friction testing is 10 μN, which could meet the demands of micro friction testing with short stroke and high resolution and realize the precise test of micro friction. And at the same time it has been analysed which load is unstable during testing.

Key words： Metrology Micro-friction Reflection method Force sensor Parallel cantilever

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	Articles by authors
	XU Ying
	YU Hua-dong
	YU Zhan-jiang
	LI Yi-quan

Cite this article:

XU Ying,YU Hua-dong,YU Zhan-jiang, et al. Design of the Micro-friction Testing System[J]. Acta Metrologica Sinica, 2013, 34(5): 452-456.

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http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2013.05.11 OR http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2013/V34/I5/452

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