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| The Parameters Design and Analysis of Micro-nano CMM Probe |
| CHEN He, CHEN Xiao-huai, WANG Shan, YANG Qiao, LI Rui-jun |
| School of Instrument Science and Opto-electronic Engineering, Hefei University of Technology,Hefei, Anhui 230009, China |
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Abstract A high precision contact scanning probe is designed and four different elastic mechanism schemes were proposed. According to the requirements of measuring range, sensitive, stability and stiffness equation in every direction, optimal structures were selected. For the selected structure, the parameters design, mechanical analysis and finite element analysis were done. The analysis results show that measuring range can meet the requirement of 40 μm×40 μm×20 μm and measuring stiffness is less than 0.5 mN/μm, stiffness equation can meet the requirement .
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2013, Vol. 34 
