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| Application Research of Self-adaptation System on Single-frequency Laser Interferometer |
| HUANG Lei1,MA Hong1,MA Zhong-huan2,YIN Zi2 |
1.Changchun University of Science and Technology, Changchun, Jilin 130022, China
2.Jilin Institute of Metrology, Changchun, Jilin 130022, China |
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Abstract To analyze the equal inclination fringe on focal plane in single-frequency laser interferometer and random noise of environmental factors, a self-adaptation system was developed.The fourth-order cumulant method,signal filtering method and direct current component distilling method are adopted.The experimental results show that, the noise of the signal can be disposed by this system,so the direct current component can be distilled.Accordingly, high-precision tracking to the direct current component is achieved.By installing the self-adaptation system on single-frequency laser interferometer in operation environment,its linear measuring accuracy achieves 0.9×10-6 L, and measurement reproducibility is 0.09 μm.
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2012, Vol. 33 
