|
|
|
| Development of Nanomechanical Measurement System on the Basis of Micro Electromechanical Systems |
| ZHANG Zhi-kai1,HUA Xiao-xin2,Gao Sai3,KONRAD Herrmann3 |
1.Zhejiang Institute of Metrology, Hangzhou, Zhejiang 310013, China
2.Beijing Ponovo Power Co. LTD, Beijing 100098, China
3.Physikalische Technische Bundesanstalt, Braunschweig, D-38116, Germany |
|
|
|
|
Abstract The development and test of nanomechanical measurement methods and systems on the basis of Micro Electromechanical Systems(MEMS) is described. A MEMS-based nanoforce actuator is presented, which is developed on the basis of an electrostatic lateral comb-drive, mainly for use in material micro/nano tensile testing and atom force microscope. In order to increase the output force, a post-fabrication gap reduction method is introduced, so that the nanoforce actuator shows such features as small size, low drive voltage, high resolution (in the order of nN) and large actuation force (>1 mN), etc. Then the principle of these measurement systems, the design, the manufacture and the assembly of the MEMS as well as first test results and achieved performance parameters are described.
|
|
|
|
|
|
|
|
［1］Bell D J, Lu T J, Fleck N A, et al. MEMS actuators and sensors::observations on their performance and selection for purpose［J］. J Micromech Microeng,2005,15:153-164.
［2］Li Z,Gao S,Konrad H. Development of a micro-miniature nanoindentation instrument［C］// Recent advancement of theory and practice in hardness measurement.HARDMEKO 2007,Tsukuba,Japan:2007,13-16.
［3］Gao S,Zhang Z K,Wu Y,et al. Towards quantitative determination of the spring constant of a scanning force microscope cantilever with a microelectromechanical nano-force actuator［J］.Measurement Science Technology,2010,21(1):1-8.
［4］Tang W C,Nguyen C H,Howe R T. Laterally driven polysilicon resonant microstructures［J］.Sensors Actuators A,1989,20:25-32.
［5］Hiller K,Kuechler M,et al. Bonding and Deep RIE-a powerful combination for high aspect ratio sensors and actuators［J］. Progress in Biomedical Optics and Imaging-Proc of SPIE,2005,5715:80-91.
［6］ISO 14577-1. Metallic materials-Instrumented indentation test for hardness and materials parameters-Part 1: Test method［S］.
［7］Gao S, Li Z, Herrmann K. Development of a micro-miniature nanoindentation instrument with the force resolution of 1 nN［J］.Optoelectronics, Instrumentation and Data Processing ,2010, 46(4): 63-69.
［8］邢静忠. 有限元基础与ANSYS入门［M］. 北京:机械出版社,2005,24-30. |
|
|
|
2012, Vol. 33 
