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Study on Traceability and Calibration Method of the Load and Displacement of Nanomechanical Measurement System |
DENG Mo-jie1,2,GAO Si-tian2,LU Ming-zhen2,DU Hua2,WEI Xiao-lin3 |
1. China Jiliang University,Hangzhou,Zhejiang 310018,China
2.National Institute of Metrology,Beijing 100013,China
3. Beijing Aerospace Institute for Metrology and Measurement Technology,Beijing 100076,China |
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Abstract A study on the traceability and calibration method of the load and displacement scale factor of the instruments on the quasistatic nanoindentation mode is described. The load scale factor is the ratio of the displacement voltage, which can be obtained from a group of standard weights. The displacement scale factor represents the correlation between the displacement voltages and the displacement of the transducer.The calibration system has been tested by standard samples and been well verified in international comparison.
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