PVDF Based Flexible Piezoelectric Sensor with Micro Electrodes Array

QI Yizhou; WU Binbin; CHEN Ying; YE Liushun; XIONG Yongchang; ZHANG Shenglin; TENG Yichao; ZHAO Shenghao; ZHANG Zhengxin; ZHANG Chunlei; ZHOU Tao; XIAO Jianliang; TANG Ruitao; FU Qiqi

doi:10.3969/j.issn.1000-1158.2025.10.02

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Acta Metrologica Sinica ›› 2025, Vol. 46 ›› Issue (10) : 1411-1418. DOI: 10.3969/j.issn.1000-1158.2025.10.02

PVDF Based Flexible Piezoelectric Sensor with Micro Electrodes Array

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Abstract

Aiming to realize the function of integrating on surfaces of large curvature and measuring multi-point dynamic pressure， a PVDF （Polyvinylidene Fluoride） based flexible piezoelectric sensor with micro electrodes array was developed. Firstly， the structure of the sensor was designed according to the characteristics of the PVDF piezoelectric film and the application condition of the sensor， meanwhile the working principle of the sensor was built up. Then， the simulation model of the piezoelectric sensor with four arrayed elements was established， while the theoretical pressure measurement result of the piezoelectric sensor was calculated. The good dynamic response capability and independent pressure measurement performance of the arrayed elements on sensor were verified by the mechanical-electrical coupling simulation. Finally， a PVDF based flexible piezoelectric sensor with four sensing units was prepared by microfabrication technology. A customized platform for pressure measurement with liquid environment was built to realize the calibration of sensor sensitivity under dynamic liquid pressure. The sensitivity of one sensor unit was calibrated as 19.67 mV/kPa. The piezoelectric signal trend of the sensor units were consistent with the measured pressure， confirmed by the tests of arrayed pressure measurement， verifying the capability of acquiring arrayed dynamic signal.

Key words

mechanical metrology / piezoelectric sensor / flexible electronics / PVDF piezoelectric film / dynamic pressure / arrayed pressure measurement

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QI Yizhou , WU Binbin , CHEN Ying , et al . PVDF Based Flexible Piezoelectric Sensor with Micro Electrodes Array[J]. Acta Metrologica Sinica. 2025, 46(10): 1411-1418 https://doi.org/10.3969/j.issn.1000-1158.2025.10.02

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