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| Performance Analysis and Optimization of Microgram Monomer Weighing Mechanism Based on Elliptical Flexure Hinge |
| ZHU Jinhui1,WANG Jian2,JIANG Wensong1,LUO Zai1 |
1. College of Metrology & Measurement Engineering, China Jiliang University,Hangzhou,Zhejiang 310018,China
2. National Institute of Metrology,Beijing 100029,China |
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Abstract To improve the sensitivity of single weighing mechanism, the performance of microgram monomer weighing mechanism was analyzed and optimized, and the mathematical model of the weighing mechanism based on elliptical flexure hinge was established. The sensitivity of the weighing mechanism was evaluated by the end displacement of the beam of the weighing mechanism. The influence of elliptical and circular hinge on the sensitivity of the weighing mechanism was verified by changing the hinge thickness in different parts. The accuracy of the model was verified with Ansys Workbench finite element simulation software, and the evaluation basis for the mesh division of flexible hinges was given. The results show that the minimum error of the model is 1.8%, and under 1μg load, the end displacement of elliptical hinge increases by 0.39nm compared with circular hinge.
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Received: 29 November 2023
Published: 05 September 2024
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CHEN G M, JIA J Y, LIU X Y, et al. Design Calculation and Analysis of Elliptical Flexure Hinges［J］. Engineering Mechanics, 2006(5): 152-156.
|
| ［4］ |
王健, 彭程. 用于量值传递的高精度单晶硅球质量测量研究［J］. 计量学报, 2021, 42(3): 265-270.
|
| ［5］ |
曾涛, 鲁云峰, 李正坤, 等. 能量天平水平安培力与电磁转矩引起对准能量误差的评估［J］. 计量学报, 2018, 39(6): 753-758.
|
| ［7］ |
SMITH S T, BADAMI V G, DALE J S, et al. Elliptical flexure hinges［J］. Review of Scientific Instruments, 1997, 68(3): 1474-1483.
|
| ［6］ |
白洋, 王大伟, 李正坤, 等. 能量天平悬挂系统初始位姿识别方法［J］. 计量学报, 2020, 41(3): 273-278.
|
| ［8］ |
CHEN G, MA Y, LI J. A tensural displacement amplifier employing elliptic-arc flexure hinges［J］. Sensors and Actuators A: Physical, 2016, 247: 307-315.
|
| ［1］ |
DARNIEDER M, PABST M, WENIG R, et al. Static behavior of weighing cells［J］. Journal of Sensors and Sensor Systems, 2018, 7(2): 587-600.
|
| ［3］ |
LPEZ D, DECCA R S, FISCHBACH E, et al. MEMS-based force sensor: Design and applications［J］. Bell Labs Technical Journal, 2005, 10(3): 61-80.
|
|
WANG J, PENG C. Research on High Accuracy Mass Measurement of Silicon Sphere in the Dissemination of Mass Unit［J］. Acta Metrologica Sinica, 2021, 42(3): 265-270
|
|
ZENG T, LU Y F, LI Z K. Joule Balance Alignment Energy Error Evaluation by Horizontal Ampere Force and Electromagnetic Torque［J］. Acta Metrologica Sinica, 2018, 39(6): 753-758.
|
| ［2］ |
DARNIEDER M, FRHLICH T, THESKA R. Tilt Sensitivity Modeling of a Monolithic Weighing Cell Structure［M］.Berlin: Springer International Publishing: 2019.
|
|
BAI Y, WANG D W, LI Z K, et al. Recognition of Initial Position and Posture of Suspended Coil in Joule Balance［J］. Acta Metrologica Sinica, 2020, 41(3): 273-278.
|
| ［9］ |
陈良柱. 精密电子分析天平关键技术研究［D］. 长沙: 湖南大学, 2013.
|
| ［11］ |
LOBONTIU N, PAINE J S, O’MALLEY E, et al. Parabolic and hyperbolic flexure hinges: flexibility, motion precision and stress characterization based on compliance closed-form equations［J］. Precision Engineering, 2002, 26(2): 183-192.
|
| ［14］ |
XU W, KING T. Flexure hinges for piezoactuator displacement amplifiers: flexibility, accuracy, and stress considerations［J］. Precision Engineering, 1996, 19(1): 4-10.
|
|
LIU Q G, SUN G, QIN Z R, et al. Kinematics Analysis and Parameter Design of Leverage Balancing Mechanism Based on Flexible Hinges［J］. Chinese Journal of Sensors And Actuators, 2016, 29(03): 313-319.
|
| ［17］ |
黄强. 基于DLS的智能电子分析天平研究［D］. 长沙: 湖南大学, 2017.
|
| ［13］ |
KECK L, SHAW G, THESKA R, et al. Design of an Electrostatic Balance Mechanism to Measure Optical Power of 100 kW［J］. IEEE Transactions on Instrumentation and Measurement, 2021, 70: 1-9.
|
| ［16］ |
陈贵敏, 贾建援, 刘小院, 等. 椭圆柔性铰链的计算与分析［J］. 工程力学, 2006(5): 152-156.
|
| ［19］ |
LIPKIN H, PATTERSON T. Generalized center of compliance and stiffness［C］//Proceedings 1992 IEEE international conference on robotics and automation. Nice, France, 1992.
|
| ［10］ |
WEDRICH K, CHERKASOVA V, PLATL V, et al. Stiffness Considerations for a MEMS-Based Weighing Cell［J］. Sensors, 2023, 23(6): 3342.
|
| ［12］ |
TIAN Y, SHIRINZADEH B, ZHANG D, et al. Three flexure hinges for compliant mechanism designs based on dimensionless graph analysis［J］. Precision Engineering, 2010, 34(1): 92-100.
|
| ［15］ |
刘庆纲, 孙庚, 秦自瑞, 等. 基于柔性铰链的杠杆-平衡机构的运动特性分析与参数设计［J］. 传感技术学报, 2016, 29(03): 313-319.
|
| ［18］ |
WEDRICH K, CHERKASOVA V, PLATL V, et al. Stiffness Considerations for a MEMS-Based Weighing Cell［J］. Sensors, 2023, 23(6): 3342.
|
| ［20］ |
WEISBORD P. How to design flexure hinges［J］. Machine Design, 1965: 151-156.
|
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|
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2024, Vol. 45 
