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| Research on Saturation Absorption Frequency Stabilization System Based on Rb MEMS Vapor Cell |
| LIU Ya-lei1,2,JIA Shuo2,JIANG Zhi-yuan2,WANG Jin2,WANG Jian-bo2,YUAN De-cheng1,LIN Ping-wei2,MA Ai-wen3,QU Ji-feng2 |
1. Shenyang University of Chemical Technology,Shenyang,Liaoning 110142,China
2. National Institute of Metrology,Beijing 100029,China
3. Chinese Society for Measurement,Beijing 100029,China |
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Abstract A microfabricated rubidium (Rb) atomic vapor cell is fabricated through micro-electro-mechanical system (MEMS) fabrication technology, which is applied to saturated absorption spectra and laser frequency stabilization. To achieve the three cavities glass-silicon-glass ‘sandwich’ structure, deep reactive ion etching and anodic bonding processes are adopted. Saturated absorption spectra frequency stabilization system based on Rb MEMS atomic vapor cell is built with an external cavity semiconductor laser with at 780nm. The MEMS vapor cell is heated and temperature controlled, and the saturated absorption spectra at different temperatures and optical powers are analysed. The experiment adopts the beat frequency method by two lasers after the laser frequency is locked through lock-in amplifier to evaluate the performance of the system. Experimental result shows that frequency stability of 1s and 100s integration time is 2.7×10-11 and 6.3×10-12.
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Received: 03 January 2023
Published: 22 August 2023
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2023, Vol. 44 
