The Method to Measure Small Angle by Two-arm Non-common Path Non-localized Interference of Point Light Source

ZHANG Bao-wu; CUI Jian-jun; OUYANG Ye-feng; CHEN Kai; FANG Zhen-yuan

doi:10.3969/j.issn.1000-1158.2023.08.08

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Acta Metrologica Sinica ›› 2023, Vol. 44 ›› Issue (8) : 1202-1207. DOI: 10.3969/j.issn.1000-1158.2023.08.08

The Method to Measure Small Angle by Two-arm Non-common Path Non-localized Interference of Point Light Source

ZHANG Bao-wu¹,CUI Jian-jun²,OUYANG Ye-feng¹,CHEN Kai²,FANG Zhen-yuan¹

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Abstract

In order to enhance the measurement precision of the small angle, a method to measure small angle by two-arm non-common path non-localized interference of point light source is presented. In the method, the angle measurement system is built by establishing the theoretical model of small angle measurement, and the interference concentric rings are recorded by the CCD without lens and small pixs on the large target surface. The principle of the method is to fit a series of rings and circle center positioning method by multi-ring regression with both dark ring and bright ring. The method can measure the lateral shift of the center of the circle with high precision, and complete the comparison measurement experiment with the laser interference small angle measuring instrument. For the proposed angle system, the results show that the maximum fluctuation of the stability is -2.46″ in the x direction, and -1.92″ in the y direction within three hours; the repeatability had good agreement with the small angle laser interference within ±0.50″ which has a maximum deviation of -0.45″.

Key words

metrology / measure small angle / non-localized interference / concentric rings / two-arm non-common path

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ZHANG Bao-wu,CUI Jian-jun,OUYANG Ye-feng,CHEN Kai,FANG Zhen-yuan. The Method to Measure Small Angle by Two-arm Non-common Path Non-localized Interference of Point Light Source[J]. Acta Metrologica Sinica. 2023, 44(8): 1202-1207 https://doi.org/10.3969/j.issn.1000-1158.2023.08.08

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