微小电容测量仪500fF/1MHz溯源方法研究

doi:10.3969/j.issn.1000-1158.2022.07.15

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Abstract Micro capacitance measuring instrument in fF level has an important role in Military electronic products.In order to solve the no traceability problem of micro capacitance measuring instrument at 500fF/1MHz, a high frequency 500fF standard capacitor encapsulated with inert gas was manufactured as transfer standard.A measurement model of micro capacitance with high frequency was established, and the distributed parameter was estimated using “subjunctive” method.In the end, the uncertainty of a traceability method called “theoretical deduction” achieves 0.15%.Using three micro capacitance measuring instruments in the same level, the uncertainty of a traceability method called “measurement comparison” achieves 0.07%.The two kinds of traceability methods were used to calculate the same instrument, and the test results showed the same effect, which can satisfy users requirements.The above two traceability methods give an effective way for micro capacitance measurement in high frequency with lower capacitance.

Key words： metrology micro capacitance transfer standard high frequency standard capacitor subjunctive method measurement comparison

Received: 27 October 2020 Published: 18 July 2022

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TB971

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	Articles by authors
	QIAO Yu-e
	LIU Xia-mei
	JIN Pan
	DING Chen
	REN Yu-long
	WU Ai-hua
	XU Yan-jun

Cite this article:

QIAO Yu-e,LIU Xia-mei,JIN Pan, et al. Research on Traceability Method of Micro Capacitance Measuring Instrument at 500fF/1MHz[J]. Acta Metrologica Sinica, 2022, 43(7): 934-939.

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http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2022.07.15 OR http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2022/V43/I7/934

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