可见光热反射成像测温中图像配准技术研究

doi:10.3969/j.issn.1000-1158.2022.03.09

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Abstract To eliminate the impact of relative drift between DUT (device under test) and test instruments on thermoreflectance thermography, the image registration algorithm is studied, cooperated with a piezoelectric three axis nano-scale position stage, real time correction of drift is realized. Sub-pixel image registration algorithm is realized by Fourier transform, convolution in frequency domain and sinc function approximation, it can calculate the relative drift in real time; a test setup for thermoreflectance thermography is build, the position of the DUT is adjusted in real time by the three axis nano-scale position stage; the results show that, when the temperature of DUT rises from 20℃ to 50℃, there is an obvious displacement in the horizontal direction of the DUT, and this displacement can be correction by the test setup. A typical GaN HEMTs device is tested, the results are consistent with those measured by foreign testing institutions, and the image registration method is proved to be effective.

Key words： metrology image registration thermoreflectance thermography 3-axis piezoelectric stage

Received: 26 October 2020 Published: 23 March 2022

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TB96

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	Articles by authors
	ZHAI Yu-wei
	LIU Yan
	LI Hao
	WU Ai-hua

Cite this article:

ZHAI Yu-wei,LIU Yan,LI Hao, et al. Weak Signal Measurement in Thermoreflectance Temperature Testing Based on Stochastic Resonance[J]. Acta Metrologica Sinica, 2022, 43(3): 355-359.

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http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2022.03.09 OR http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2022/V43/I3/355

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