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| Development of A New Method for Millimeter-waveintrinsic On-wafer Measurements |
| WANG Yi-bang1,WU Ai-hua1,HUO Ye1,LIANG Fa-guo1,LUAN Peng1,LIU Chen1,DU Jing2 |
1. The 13th Research Institute of China Electronics Technology Group Corporation, Shijiazhuang, Hebei 050051, China
2. Shijiazhuang Division of PLA Infantry Academy, Shijiazhuang, Hebei 050083, China |
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Abstract To proposes accurate method for millimeter-wave devices intrinsicscatter-parameters. For millimeter-wave circuit design, accurate simulation result is required. For this reason, an accurate measurement of de-embedding is a key technique for device characterization, and is also important. In this work, a new model based on conventional open-short de-embedding method and corresponding solutionalgorithm are proposed. By adding transmission line with open and short standards to gain approximate ideal open and short, and at the same time, consummate the model with crosstalk which grows larger with increasing frequency.Considering the complex solution with crosstalk, the new model could eliminate the crosstalk influence on device under test avoiding knowing it. Calibration kits and device under test were also fabricated and measured. 110GHz Passive device was measured subject to both new method here and second tier crosstalk calibrations proposed by NIST. Measurement results demonstrate that new method is capable of eliminating the cross-talk and PAD more accurately with an improvement S;21 magnitude of 1.3dB, and show a promising result with NIST. A serial of active pHEMT test results also showed that, the new method was more accurate at device maxgain.
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Received: 22 July 2021
Published: 23 March 2022
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［1］Wang Y B, Fu X C, Wu A H, et al. Development of gallium-arsenide-based GCPW calibration kits for on-wafer measurements in the W-band ［J］. International Journal of Microwave and Wireless Technologies, 2020, 12: 367-371.
［2］Kawai S, Sato S, Maki S, et al. Accurate Transistor Modeling by Three-Parameter Pad Model for Millimeter-Wave CMOS Circuit Design ［J］. IEEE Trans Microw Wave Theory Techn, 2016, 64, (6): 1736-1744.
［3］Williams D F, Schmuckle F J, Doerner R. Crosstalk Corrections for Coplanar-Waveguide Scattering-Parameter Calibrations ［J］. IEEE Trans Microw Wave Theory Techn, 2014, 62(8): 1748-1761.
［4］Andrej R, Ralf D, Edward M. The Influence of Calibration Substrate Boundary Conditions on CPW Characteristics and Calibration Accuracy at mm-Wave Frequencies ［C］// ARFTG Microwave Measurement Symposium, 2008.
［5］Schmuckle F J, Doerner R, Phung G N, et al. Radiation, Multimode Propagation, and Substrate Modes in W-band CPW Calibration ［C］// IEEE Proceeding of the 41st European Microwave Conference, 2011.
［6］Minami R, Han C, Matsushita K, et al. Effect of transmission line modelling using different de-embedding methods ［C］// IEEE Proceeding of the 41st European Microwave Conference, 2011.
［7］Koolen M C A M, Geelen J A M, Versleijen M P J G. An improved de-embedding technique for on-wafer high-frequency characterization ［C］// Proc Bipolar Circuits and Technol Meeting, 1991.
［8］Ito H, Masu K. A simple through-only de-embedding method for on-wafer S-parameter measurements up to 110GHz ［C］// IEEE MTT-S Int Microw Symp Dig, 2008.
［9］Rautio J C. A de-embedding algorithm for electromagnetics ［J］. Microw Millimeter-Wave Comput Aided Eng, 1991, 1(3): 282-287.
［10］Song J, Ling F, Flynn G, et al. A de-embedding technique for interconnects ［C］// IEEE 10th Topical Meeting on Electrical Performance of Electronic Packaging, 2001.
［11］Engen G F, Hoer C A. Thru-reflect-line: An improved technique for calibrating the dual six-port automatic network analyser ［J］. IEEE Trans Microw Theory Techn, 1979, 27(12): 987-993.
［12］Marks R B, Williams D F. Characteristic impedance determination using propagation constant measurement ［J］. IEEE Microw Guided Wave Lett, 1991, 1(6): 141-143.
［13］Mangan A M, Voinigescu S P, Yang M T, et al. De-embedding transmission line measurements for accurate modelling of IC designs ［J］. IEEE Trans. Electron Devices, 2006, 53(2): 235-241.
［14］Butler J V, Rytting D, Iskander M F, et al. 16-term error model and calibration procedure for on wafer network analysis measurements ［MMICs］［J］. IEEE MTT-S Int Microw Symp Dig, 1991, 3: 1125-1127.
［15］Butler J V, Rytting D, Iskander M F, et al. 16-term error model and calibration procedure for on-wafer network analysis measurements ［J］. IEEE Trans Microw Wave Theory Techn, 1991, 39(12): 2211-2217.
［16］Wei X, Niu G, Sweeney S L, et al. Singular-value-decomposition based four port de-embedding and single-step error calibration for on-chip measurement ［C］// IEEE. International Microwave Symposium. 2007.
［17］Liang Q, Cressler J D, Niu G, et al. A simple four-port parasitic deembedding methodology for high-frequency scattering parameter and noise characterization of SiGe HBTs ［J］. IEEE Trans Microw Wave Theory Techn, 2003, 51(11): 2165-2174.
［18］Wei X, Xia K, Niu G, et al. An improved on-chip 4-port parasitics de-embedding method with application to RFCMOS ［C］// Silicon Monolithic Integr Circuits in RF Syst Top Meeting. 2007.
［19］Liu C, Wu A H, Li C, et al. A new SOLT calibration method for leakage ［J］. IEEE Trans Microw Theory Techn, 2018, 27(12): 987-993.
［20］Williams D F, Young A C, Urteaga M. A prescription for sub-millimeter-wave transistor characterization ［J］. IEEE Trans THz Sci Technol, 2013, 3(4): 433-439.
［21］Marks R B. A multiline method of network analyzer calibration ［J］. IEEE Trans Microw Wave Theory Techn, 1991, 39(7): 1205-1215.
［22］王一帮, 周瑞, 陈婷, 等. 110GHz在片16项误差模型校准件定值方法研究 ［J］. 计量学报, 2021, 42(3): 365-369.
Wang Y B, Zhou R, Chen T, et al. Investigation into Definition Method for On-wafer 16-term Error Model Calibration Kits Below 110GHz ［J］. Acta Metrologica Sinica, 2021, 42(3): 365-369.
［23］栾鹏, 王一帮, 梁法国, 等. 低介质损耗共面波导传输线电容准确测量 ［J］. 计量学报, 2018, 39(2): 100-102.
Luan P, Wang Y B, Liang F G, et al. Coplanar Waveguide Transmission Line Capacitance Measurement and Uncertainty Analysis ［J］. Acta Metrologica Sinica, 2018, 39(2): 100-102.
［24］王一帮, 栾鹏, 吴爱华, 等. 基于Multi-TRL算法的传输线特征阻抗定标 ［J］. 计量学报, 2017, 38(1): 1-5.
Wang Y B, Luan P, Wu A H, et al. An Accurate Determination Method of Characteristic Impedance of Transmission Line Based on Multi-TRL Algorithms ［J］. Acta Metrologica Sinica, 2017, 38(1): 1-5. |
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2022, Vol. 43 
