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| The Method for Measuring the Positioning Accuracy of Confocal Raman Microscope |
| DING Xiang,FU Yan-zhe,LI Fei,LIU Wen-li |
| National Institute of Metrology, Beijing 100029, China |
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Abstract Confocal Raman microscopy (CRM) usually acquires images by scanning samples point by point. The positioning error of three dimensional stages may cause the image distortion and the mismatch between the image and the real sample. A simple method was proposed to measure the positioning accuracy of the Raman imaging. The measurement accuracy was enhanced by using the method of Fermi function fitting. A testing phantom was fabricated by coating a 70nm thick layer of chromium pattern onto the surface of a piece of silicon substrate. A commercial CRM was tested and its positioning repeatability is 0.2μm. Results show that the method is capable of measuring the positioning accuracy of CRM and it has the advantages of simplicity and stability.
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Received: 04 September 2020
Published: 18 October 2021
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2021, Vol. 42 
