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| Temperature Calibration Method of Optical Power Thermal Analyzer |
| LI Shuo1,YU Zhi-gao2,YAO Ya-xuan1,REN Ling-ling1 |
1. Center for Advanced Measurement Science, National Institute of Metrology, Beijing 100029, China
2. School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan, Hubei 430074, China |
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Abstract The accurate measurement of phase change temperature of thin film materials is the key to application of phase change materials. The optical power thermal analyzer (OPA) is a new apparatus to measure the phase change temperature of thin film materials. The mechanism of OPA is that the optical reflectivity of thin films will change dramatically after the phase change. The OPA reaches the phase change temperature of thin films by infrared heating in vacuum conditions. The temperature measurement method of OPA and in situ temperature calibration by standard thermocouple were studied for accurate measurement of phase change temperature, which was traced to SI unit. The temperature of uncertainty in the range of 100℃ to 1000℃ were evaluated. The calibration fitting formula was obtained, the correlation coefficient is 0.9997.
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Received: 22 August 2019
Published: 19 January 2021
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2021, Vol. 42 
