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| Research on Design and Performance Analysis by Using Electromagnetic Assisted Piezoelectric Actuator |
| WEI Xiao-hua,ZHENG Ling-chen |
1. School of Mechanical and Electrical Engineering, Quzhou College of Technology, Quzhou, Zhejiang 324000, China
2. School of Mechanical Engineering and Automation, Zhejiang Sci-Tech University, Hangzhou,Zhejiang 310018, China
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Abstract Conventional piezoelectric actuator suffers from the limitation of small controling scale, due to the short travelling range of piezoelectric actuation.An electromagnetic assisted piezoelectric actuator was developed, which has the advantages with both long traveling range in electromagnetic actuator and high-resolution in piezoelectric actuator.The actuator consists of movable part, guide groove, flexible member, electromagnet, piezoelectric element, and control circuits.First of all, adjusting the electromagnetic force between the maximum static friction force and kinetic friction force by setting the pre-load structure and the coil current.Then, the micro-vibration was generated by piezoelectric components to control transition between static friction and kinetic friction using contact situation of the movable part and the guide groove.Therefore, the actuator can perform reciprocating motion with long traveling range(10mm) and high resolution(1.5μm). The experiment results showed that the proposed actuator has excellent positioning ability.
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Received: 30 September 2018
Published: 29 June 2020
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2020, Vol. 41 
