利用微米划痕研究TiN涂层的失效机理

doi:10.3969/j.issn.1000-1158.2020.06.11

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Abstract The failure process of TiN coating was studied by micro-scratch and scanning electron microscope, the mechanism of friction coefficient fluctuation was analyzed and the fracture toughness of the coating was evaluated. The results show that at low load stage, the TiN coating undergoes shear slip, and the edge of the scratch track appears from the reverse V-shaped crack to the parallel crack, and then to the forward V-shaped crack; as the normal load increases, the TiN coating undergoes stepwise spalling. Fluctuations in the coefficient of friction are mainly due to surface topography and coating failure, different loading methods have different friction coefficients. The fracture toughness of the TiN coating can be tested accurately with micro-scratches, which is consistent with the test results of the indentation fracture method and the finite element simulation method.

Key words： metrology friction coefficient TiN coating failure mechanism micro-scratch fracture toughness

Received: 03 September 2018 Published: 08 June 2020

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TB93

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	Articles by authors
	LIU Ming
	LI Shuo
	GAO Cheng-hui

Cite this article:

LIU Ming,LI Shuo,GAO Cheng-hui. Study of Failure Mechanism of TiN Coatings by Micro-scratch Testing[J]. Acta Metrologica Sinica, 2020, 41(6): 696-703.

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http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2020.06.11 OR http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2020/V41/I6/696

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