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| Coplanar Waveguide Transmission Line Capacitance Measurement and Uncertainty Analysis |
| LUAN Peng1,WANG Yi-bang1,LIANG Fa-guo1,YANG Bao-guo2 |
1. The 13th Research Institute of China Electronics Technology Group Corporation, Shijiazhuang, Hebei 050051,China
2. The 41th Research Institute of China Electronics Technology Group Corporation, Qingdao, Shandong 266555, China |
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Abstract An accurate method is used to determine the coplanar waveguide (CPW) transmission line capacitance of commercial alumina substrate 101-190C （CASCADE）, which involves the measurement of transmission lines reflect and extrapolation technique. An MCM method is used to evaluate the uncertainty of transmission line capacitance measurement, which involves calibration kit and dynamic accuracy of magnitude and phase. Finally, the transmission line capacitance is used in the multiline TRL calibration, the result is very contiguous with NIST. Compared with NIST, the results show that the error of the magnitude of reflection is within ±0.02, the error of the transmission magnitude is within ±0.05 dB, and the error of the transmission phase is within ±1° above 40 GHz.
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Received: 27 October 2017
Published: 11 February 2018
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2018, Vol. 39 
