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| The Research of Real-time Focusing and Inclination Angle Measurement on Metrological Ultraviolet Microscope |
| GAO Jin-yang1,GAO Si-tian2,DONG Ming-li1,LIAN Xiao-yi2,PI Lei2,SHU Hui2 |
1. School of Instrument Science and Opt-electronics Engineering, Beijing Information Science and TechnologyUniversity, Beijing 100192, China;
2.National Institute of Metrology, Beijing 100029, China |
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Abstract The metrological ultraviolet microscope utilizes 248nm ultraviolet light illumination and high numerical aperture objective systems, the working distance and depth of field are very small. In order to achieve a clear image, it is required the automatic focus. An auto-focus and inclination measurement algorithm is researched. Using the automatic focusing method based on image processing, the Tenengrad function is selected as the image clarity criteriont. To solve the problem that the standard model tilt and the lens may collide during the scanning measurement, a method of measuring the inclination of the template is proposed to judge the inclination angle and direction of the template, and the real-time focusing is realized.
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Received: 23 May 2017
Published: 27 September 2017
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2017, Vol. 38 
