|
|
|
| Study on Undecided Steps Technique of the Improved Measurement System for Phase-shifting Profilometry |
| ZHOU Ming-an1,XU Jian-liang1,FANG Xiao-fen1,2 |
1. School of Mechanical Engineering, Quzhou College of Technology, Quzhou, Zhejiang 324000, China
2. Institute of Advanced Manufacturing Engineering, Zhejiang University, Hangzhou, Zhejiang 310027, China |
|
|
|
|
Abstract Phase-shifting profilometry of the improved measurement system is proposed. The proposed system makes the three constraints of the traditional phase-shifting profilometry measurement system less stringent, and reduces requirements of the structure for the system. Compared with traditional phase profile measurement technology, phase-shifting does not need to be equal, and the method can only two distorted grating images which reconstruct 3-D shape. Through theoretical analysis, the mathematical relationship between the phase and the height is given. Experiments show that on the premise of the measurement accuracy can be satisfied, the structure is less demanding for the accuracy of the system, and the improved measurement system is faster and more practical.
|
|
Received: 29 September 2014
Published: 27 January 2016
|
|
|
|
|
|
［1］朱红军, 高潮, 郭永彩. 基于计算机视觉的非朗伯表面三维重构［J］. 强激光与粒子束, 2014, 26(01):19001.
［2］段黎明, 邱猛, 吴朝明. 面向逆向工程的工业 CT 图像预处理系统开发［J］. 强激光与粒子束, 2008, 20(4): 666-670.
［3］马建荣, 郝群, 朱秋东. 基于球坐标的逆向哈特曼面形测量法［J］. 计量学报, 2013, 34(1): 11-15.
［4］牛小兵. 光栅投射三维轮廓测量技术的研究［D］.天津: 天津大学, 2003.
［5］许庆红, 钟约先. 光栅投影轮廓测量的系统标定技术［J］. 光学技术, 2000, 26(2): 126-129.
［6］田丰, 陈文艺. 一种实用化的三维测量系统［J］. 光电工程, 1996, 23(5): 64-68.
［7］王丽莉, 曹益平, 毕泽. CCD 非可视区域下空间方位角检测方法［J］. 强激光与粒子束, 2013, 25(9): 2188-2192.
［8］谢旭东, 陈波, 刘华. CCD 系统线性动态范围的标定［J］. 强激光与粒子束, 2000, 12(11): 182-184.
［9］陈涛, 曹益平, 曾茜逾. 基于傅里叶变换解相法的像增强管多参数测量［J］. 强激光与粒子束, 2012, 23(10): 2678-2682.
［10］郑东亮, 达飞鹏. 双步相移光栅投影测量轮廓术［J］. 光学学报, 2012, 32(5): 86-92.
［11］Lin M, Nitta K, Matoba O, et al. Parallel phase-shifting digital holography with adaptive function using phase-mode spatial light modulator［J］. Applied optics, 2012, 51(14): 2633-2637.
［12］Ke L, Yanqiu L. High precision alignment of phase-shifting point diffraction interferometer［J］. Chinese J Lasers, 2010, 37(7): 1845-1849.
［13］Liu Y F, Cao Y P, He Y H. An improved algorithm to three-unequal step length for PMP［J］. Journal of Optoelectronics Laser, 2010, 21(1):83-86.
［14］Liu G, Wang R, Deng Y K, et al. A new quality map for 2-D phase unwrapping based on gray level co-occurrence Matrix［J］. Geoscience & Remote Sensing Letters IEEE, 2014, 11(2):444-448.
［15］Zhang Y, Wang S, Ji G, et al. An improved quality guided phase unwrapping method and its applications to MRI［J］. Progress In Electromagnetics Research, 2014, 145(2):273-286.
［16］Zhong H, Tang J, Zhang S, et al. A quality-guided and local minimum discontinuity based phase unwrapping algorithm for inSAR/inSAS interferograms［J］. IEEE Geoscience & Remote Sensing Letters, 2014, 11(1):215-219. |
|
|
|
2016, Vol. 37 
