Angle Vibration Calibration Technology Research by Diffraction Grating Heterodyne Laser Interferometry

YU Mei; LIU Ai-dong; HE Wen; YANG Li-feng; ZUO Ai-bin; HU Hong-bo

doi:10.3969/j.issn.1000-1158.2015.06.01

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Acta Metrologica Sinica ›› 2015, Vol. 36 ›› Issue (6) : 561-564. DOI: 10.3969/j.issn.1000-1158.2015.06.01

Angle Vibration Calibration Technology Research by Diffraction Grating Heterodyne Laser Interferometry

YU Mei¹,LIU Ai-dong¹,HE Wen²,YANG Li-feng¹,ZUO Ai-bin¹,HU Hong-bo¹

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Abstract

As in all areas of rotational angular vibration (angular acceleration and angular velocity and angular displacement) measurement increase in demand, research and the establishment of the angular acceleration national primary standard device to solve all kinds of rotation angle vibration sensors and measuring instruments quantity traceability problem is imminent. Based on the analysis of domestic and foreign research present situation, the steady state sine angle vibration excitation system, laser interference measurement system and the data processing technology of angular acceleration absolute calibration method was discussed; And the technical difficulties in development of the high precision rotation angle vibration excitation system and sine-phase diffraction grating disc are proposed.

Key words

metrology / sinusoidal angular vibration / angular exciter / angular acceleration primary standard / diffraction-gating interferometer / measurement traceability

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YU Mei,LIU Ai-dong,HE Wen,YANG Li-feng,ZUO Ai-bin,HU Hong-bo. Angle Vibration Calibration Technology Research by Diffraction Grating Heterodyne Laser Interferometry[J]. Acta Metrologica Sinica. 2015, 36(6): 561-564 https://doi.org/10.3969/j.issn.1000-1158.2015.06.01

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