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| The Interferometric Method for the Cylindrical Surface |
| YU Ying-jie1,XU Hai-feng1,PENG Jun-zheng2 |
1. Department of Precision Mechanical Engineering, Shanghai University, Shanghai 200072, China;
2. College of Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, China |
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Abstract An interferometric method to measure the cylindrical surface is proposed. The computer generated hologram was used as wavefront converter, which can convert the plane wavefront into cylindrical wavefront. With it, a cylindrical interferometric system was built. To get the real surface figure of the tested cylindrical surface, a misalignment aberrations removal method is also proposed .Lastly, several experiments were carried out to validate the proposed method and system, where the glass cylinder was chosen as a target. The repeatability of single aperture measurement was investigated by measuring the target 20 times. The standard deviation (PV) is 20.2 nm that is 0.55% of the average value of PV.
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2015, Vol. 36 
