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| Research on Liquid Viscosity Sensitivity Using Love Wave Device |
| WANG Meng-yang1,CHEN Zhi-jun1,2,JIANG Ling1,LIU Jing-yong3,TONG Rui1 |
1.College of Automation Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing, Jiangsu 210016, China;
2.Modern Acoustics in Key Laboratory of Ministry of Education, Nanjing University, Nanjing, Jiangsu 210093, China;
3. No.55 Research Institute, China Electronics Technology Group Corporation, Nanjing, Jiangsu 210008, China |
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Abstract he theory model of Love wave loaded with viscous liquid is established, the influences of liquid viscosity on propagation velocity of Love wave are analyzed. The thickness of the film is optimized and the Love wave device is fabricated on 36°LiTaO3 with a SiO2 film overlaid. The device is fabricated and tested, The experimental results are basically in accordance with simulation analysis, proving the validity of theory model.
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2015, Vol. 36 
