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| High Precision Roundness Measurement for Large Cylindrical Shaft Based on Multiple Capacitance Sensors |
| KANG Yan-hui1,ZHANG Heng1,LI Ying-zhong2 |
1.National Institute of Metrology, Beijing 100013, China
2.Beijing Dongfang Jingyi Machinery & Equipment Co． Ltd, Beijing 100074, China |
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Abstract In order to realize the high precision roundness on-line measurement for large cylindrical shaft, a non-contact roundness measurement system based on multiple capacitance sensors is developed, which can measure the range of Ф800 mm. The roundness measurement methods for the shaft of large high-precision rotary tables are analyzed, especially the error separation technique by three-point method. The principle and structure of capacitance sensor are discussed, and the system composition and data evaluation methods are presented. Compared with a high precision roundness measurement equipment, the experimental result shows that the indication error is better than 0.1 μm and repeatability is less than 0.05 μm, which can satisfy the field measurement.
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2012, Vol. 33 
