二维精密工作台离散点测量结果误差分离的新方法研究
郭天太, 王晓晓, 洪博, 赵军, 孔明, 高思田
A New Error Separation Method for Measurement Results of Discrete Points of 2D Precision Stage
GUO Tian-tai, WANG Xiao-xiao, HONG Bo, ZHAO Jun, KONG Ming, GAO Si-tian
计量学报
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2014, (2): 113
-119
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DOI: 10.3969/j.issn.1000-1158.2014.02.04