薄膜热扩散率测量技术研究进展
韩艺良, 张圣梓, 刘晓萌, 郝蕴琦, 杨坤, 汪洪军
Research Progress in Thin Film Thermal Diffusivity Measurement Technology
HAN Yiliang, ZHANG Shengzi, LIU Xiaomeng, HAO Yunqi, YANG Kun, WANG Hongjun
计量学报
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2026, (1): 63
-75
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DOI: 10.3969/j.issn.1000-1158.2026.01.09
