一维纳米栅格(100、200 nm)国家计量比对中传递标准测量方法研究
王芳, 施玉书, 皮磊, 张树
Research on the Measurement Method of Transfer Standards in One⁃dimensional Nano Gratings (100, 200 nm) Comparison in China
WANG Fang, SHI Yushu, PI Lei, ZHANG Shu
计量学报
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2025, (9): 1294
-1299
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DOI: 10.3969/j.issn.1000-1158.2025.09.08