衍射光栅外差激光干涉法角振动校准技术研究
于梅,刘爱东,何闻,杨丽峰,左爱斌,胡红波
Angle Vibration Calibration Technology Research by Diffraction Grating Heterodyne Laser Interferometry
YU Mei,LIU Ai-dong,HE Wen,YANG Li-feng,ZUO Ai-bin,HU Hong-bo
计量学报
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2015, (6): 561
-564
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DOI: 10.3969/j.issn.1000-1158.2015.06.01
