PCM设备电容参数整体校准方法研究

PCM设备电容参数整体校准方法研究

乔玉娥,刘霞美,丁晨,朱超,吴爱华

Research on Overall Calibration Method of PCM Equipment Capacitance Parameters

QIAO Yu-e,LIU Xia-mei,DING Chen,ZHU Chao,WU Ai-hua

计量学报 . 2023, (6): 962 -967 . DOI: 10.3969/j.issn.1000-1158.2023.06.18