小型化硅基微腔光子测温系统
梅明城,韩琪娜,施杨,周琨荔,曾九孙,王瑾,张诚,高建新,瞿志二,潘奕捷,屈继峰
A Miniaturized Silicon Microcavity Based Photonic Temperature Measurement System
MEI Ming-cheng,HAN Qi-na,SHI Yang,ZHOU Kun-li,ZENG Jiu-sun,WANG Jin,ZHANG Cheng,GAO Jian-xin,QU Zhi-er,PAN Yi-jie,QU Ji-feng
计量学报
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2023, (7): 1052
-1058
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DOI: 10.3969/j.issn.1000-1158.2023.07.07
