在片校准件参数定值方法
霍晔,吴爱华,王一帮,栾鹏,刘晨,梁法国,孙静,张立飞
Method for Definition Parameters of On-Wafer Calibration Standards
HUO Ye,WU Ai-hua,WANG Yi-bang,LUAN Peng,LIU Chen,LIANG Fa-guo,SUN Jing,ZHAGN Li-fei
计量学报
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2022, (8): 979
-983
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DOI: 10.3969/j.issn.1000-1158.2022.08.02
