发射率对半导体器件显微红外测温结果的影响

发射率对半导体器件显微红外测温结果的影响

韩伟,刘岩,杜蕾,郑世棋,翟玉卫,梁法国

Influence of Emissivity of Infrared Thermal Results of Semiconductor Device

HAN Wei,LIU Yan,DU Lei,ZHENG Shi-qi,ZHAI Yu-wei,LIANG Fa-guo

计量学报 . 2021, (1): 35 -40 . DOI: 10.3969/j.issn.1000-1158.2021.01.06