宽带在片SOLT校准件研制及表征

刘晨,吴爱华,孙静,梁法国

Manufacturing and Characterizing of Broadband on-Wafer SOLT Calibration Standards

LIU Chen,WU Ai-hua,SUN Jing,LIANG Fa-guo

计量学报 . 2017, (1): 98 -101 . DOI: 10.3969/j.issn.1000-1158.2017.01.21