微纳坐标测量机间接校准方法的探究
施玉书,高思田,宋小平,郭鑫,陈思文,皮磊,李伟,李琪,李适,王兴旺
Research on an Indirect Calibration Method of Micro/nano Coordinate Measuring Machine
SHI Yu-shu, GAO Si-tian, SONG Xiao-ping, GUO Xin, CHEN Si-wen, PI Lei,LI Wei, LI Qi, LI Shi, WANG Xing-wang
计量学报
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2017, (1): 47
-50
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DOI: 10.3969/j.issn.1000-1158.2017.01.10
