@article{郭彤:385, author = {郭彤,王思明,王龙龙,陈津平,傅星,胡小唐}, title = {基于双反馈模式的大范围自感应AFM测量系统}, publisher = {计量学报}, year = {2012}, journal = {计量学报}, volume = {33}, number = {5}, eid = {385}, numpages = {5}, pages = {385}, keywords = {计量学; 原子力显微镜测头; 双反馈测量模式; 压电陶瓷台; 纳米定位平台}, url = {http://jlxb.china-csm.org:81/Jwk_jlxb/CN/abstract/article_553.shtml}, doi = {10.3969/j.issn.1000-1158.2012.05.01} }