@article{赵欣:412, author = {赵欣,曹文会,李劲劲}, title = {用于量子电压基准中约瑟夫森结阵列的CMP平整化工艺研究}, publisher = {计量学报}, year = {2022}, journal = {计量学报}, volume = {43}, number = {3}, eid = {412}, numpages = {3}, pages = {412}, keywords = {计量学; 约瑟夫森结阵列; 化学机械平整化}, url = {http://jlxb.china-csm.org:81/Jwk_jlxb/CN/abstract/article_2154.shtml}, doi = {10.3969/j.issn.1000-1158.2022.03.17} }