@article{唐莹:17, author = {唐莹, 曹丛, 张健, 赵东升}, title = {AFM设定值对测量准确度和探针寿命的影响}, publisher = {计量学报}, year = {2019}, journal = {计量学报}, volume = {40}, number = {6A}, eid = {17}, numpages = {5}, pages = {17}, keywords = {计量学;原子力显微镜;扫描模式;设定值;探针磨损}, url = {http://jlxb.china-csm.org:81/Jwk_jlxb/CN/abstract/article_1598.shtml}, doi = {10.3969/j.issn.1000-1158.2019.6A.004} }