Research on an Indirect Calibration Method of Micro/nano Coordinate Measuring Machine
SHI Yu-shu1,2, GAO Si-tian2, SONG Xiao-ping2, GUO Xin3, CHEN Si-wen1, PI Lei2, LI Wei2, LI Qi2, LI Shi2, WANG Xing-wang2
1.State Key Laboratory of Precision Measurement Technology and Instruments, Tianjin University, Tianjin 300072, China
2.National Institute of Metrology, Beijing 100029, China
3.College of Metrology & Measurement Engineering, China Jiliang University, Hangzhou, Zhejiang 310018, China
Abstract：Since the high precision performance index of micro/nano coordinate measuring machine cannot be calibrated accurately, an indirect calibration solution is proposed. The measurement indication error of the micro/nano coordinate measuring machine is measured by gauge blocks and ball plate with hemispheres; The probing error is measured by calibration sphere. And a calibration experiment is done on the micro/nano coordinate measuring machining at National Institute of Metrology. The experimental results show that the error of indication of a CMM for size measurement is less than 0.2 μm, and the probing error is only 0.125 μm. The experiment results indicate that the error of indication of a CMM for size measurement and probing error are both less than their maximum permissible error, verifying the reasonability and feasibility of the calibration plan.
施玉书,高思田,宋小平,郭鑫,陈思文,皮磊,李伟,李琪,李适,王兴旺. 微纳坐标测量机间接校准方法的探究[J]. 计量学报, 2017, 38(1): 47-50.
SHI Yu-shu, GAO Si-tian, SONG Xiao-ping, GUO Xin, CHEN Si-wen, PI Lei,LI Wei, LI Qi, LI Shi, WANG Xing-wang. Research on an Indirect Calibration Method of Micro/nano Coordinate Measuring Machine. Acta Metrologica Sinica, 2017, 38(1): 47-50.
2017, Vol. 38 
