Effect of Wave Plates and Polarizer on the Nonlinearity of Heterodyne Interferometers
REN Xiao1,2,HOU Wen-mei3
1.College of Mechanical & Electronic Engineering and Automation,Shanghai University,Shanghai 200072,China
2.Soochow University,Suzhou,Jiangsu 215006,China
3.College of Optic & Electronic Engineering,University of Shanghai for Science and Technology,Shanghai 200093,China
Abstract:To reduce the nonlinearity error of heterodyne interferometer,the influence mechanics of wave plate and polarizer upon nonlinearity error must be determined.Theoretical and experimental analysis showed that different influence on non-linearity exits when wave plate and polarizer were placed in the front of or behind the polarized beam splitter.If the error wave plate and polarizer were placed in front of the polarization beam splitter,non-linearity was introduced definitely due to error.If the same optical components are installed inside the interferometer,it is possible to affect the nonlinearity,but usually with a factor in an order of about 10-2.
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