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计量学报  2011, Vol. 32 Issue (2): 101-105    DOI: 10.3969/j.issn.1000-1158.2011.02.02
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基于梳齿间距偏差的微加速度计灵敏度模型
戴强,于奇,钱可强,周伟
电子科技大学 电子薄膜与集成器件国家重点实验室, 四川 成都 610054
Sensitivity Model of Micro-machined Accelerometers Based on the Deviation of Comb Finger Gaps
DAI Qiang,YU Qi,QIAN Ke-qiang,ZHOU Wei
University of Electronic Science and Technology of China, State key laboratory of electronic thin films and integrated devices, Chengdu, Sichuan 610054, China
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摘要 针对电容式微加速度计梳齿间距偏差所引起的灵敏度变化,基于高维数值积分与概率理论,并结合闭环微加速度计工作原理,导出了其灵敏度模型。当梳齿间距偏差分布在3.7~4.6 μm区间,施加在固定电极上有效电压分别为2.3 V、5.1 V和8.3 V时,其对应的灵敏度将处于120~195、55~85和32~51 mV/gn范围。在相同条件下,对一批体硅玻璃键合结构的微加速度计进行了实验测量,其灵敏度分别落在119.3~179.9、53.8~81.1和33.0~49.8 mV/gn区间。由此可见,该模型与实测值比较接近。模型指出了灵敏度与梳齿间距偏差的相互关系,从而可为微加速度计设计和工艺优化提供参考。
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戴强
于奇
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关键词 计量学微加速度计灵敏度模型梳齿间距偏差    
Abstract:To cope with sensitivity deviation of capacitive micro-accelerometers brought by micro-machined process error in comb finger gaps, a sensitivity model is proposed based on probability theory and close loop capacitive micro-accelerometer mechanism. It is indicated that, by the model, when the accelerometers gaps dimensions are from 3.7 to 4.6 μm due to micro-machined process and meanwhile, effective voltages on the fixed electrodes are 2.3V, 5.1V and 8.3V respectively, sensitivities of the accelerometers will be in 120~195 mV/gn, 55~85 mV/gn and 32~51 mV/gn. Furthermore, a batch of bulk silicon accelerometers are tested. With the same effective voltages, the sensitivity test results are in 119.3~179.9 mV/gn,53.8~81.1 mV/gn and 33.0~49.8 mV/gn. Hence, the model and test results are relatively close to each other. Through the model, the relationship between sensitivity and comb finger gap process error has been revealed, which might hopefully serve as a reference for micro-accelerometer design and optimizing of the process.
Key wordsMetrology    Micro-machined accelerometers    Sensitivity model    Comb finger gap deviation
    
PACS:  TB934  
基金资助:国家自然科学基金(60576007)
作者简介: 戴强(1974-),男,四川乐山人,电子科技大学博士研究生,研究方向为微机械惯导器件。uestc_dai@163.com
引用本文:   
戴强,于奇,钱可强,周伟. 基于梳齿间距偏差的微加速度计灵敏度模型[J]. 计量学报, 2011, 32(2): 101-105.
DAI Qiang,YU Qi,QIAN Ke-qiang,ZHOU Wei. Sensitivity Model of Micro-machined Accelerometers Based on the Deviation of Comb Finger Gaps. Acta Metrologica Sinica, 2011, 32(2): 101-105.
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